The Japan Society of Applied Physics

[P-6-18] Effects of Pre-treatment on Passivation of AlGaN/GaN on Silicon HEMTs

J. H. Kim1,2, H. G. Choi1, H. J. Song1, C. H. Roh1, J. H. Lee1, J. H. Park2, C. K. Hahn1 (1.Korea Electronics Tech. Inst.(Korea), 2.Korea Univ.(Korea))

https://doi.org/10.7567/SSDM.2009.P-6-18