[P-6-18] Effects of Pre-treatment on Passivation of AlGaN/GaN on Silicon HEMTs

J. H. Kim^1,2、H. G. Choi¹、H. J. Song¹、C. H. Roh¹、J. H. Lee¹、J. H. Park²、C. K. Hahn¹ (1.Korea Electronics Tech. Inst.(Korea)、2.Korea Univ.(Korea))

https://doi.org/10.7567/SSDM.2009.P-6-18