[P-7-4] Investigation of AlGaN MSM Photodetectors with Low-Temperature AlN Cap and Recess Etched Layers

C. H. Chen¹, S. J. Chang², M. H. Wu², S. Y. Tsai¹, H. J. Chien¹ (1.Cheng Shiu Univ.(Taiwan), 2.National Cheng Kung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-7-4