[P-7-4] Investigation of AlGaN MSM Photodetectors with Low-Temperature AlN Cap and Recess Etched Layers

C. H. Chen¹、S. J. Chang²、M. H. Wu²、S. Y. Tsai¹、H. J. Chien¹ (1.Cheng Shiu Univ.(Taiwan)、2.National Cheng Kung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-7-4