[P-7-6] Fabrication and Evaluation of an Er₂SiO₅ Waveguide with a Buried Si Guide Layer for Optical Amplifier in Si Photonics

T. Nakajima¹、K. Honma¹、T. Kimura¹、H. Isshiki¹ (1.Univ. of Electro- Communications)

https://doi.org/10.7567/SSDM.2009.P-7-6