[P-9-14] New Type Oxygen Sensing Device using Oxygen Intercalation of Layered Semiconductor TiS₂

T. Imamura¹、T. Nugroho¹、Y. Ikawa¹、K. Kishiro¹、H. Kuriyaki¹ (1.Kyushu Univ.)

https://doi.org/10.7567/SSDM.2009.P-9-14