[P-9-3] Metal-oxide Thin Film Transistors with Co-sputtering Novel Aluminum Zinc Oxide Yttrium Channel Layer

S. F. Chen¹、Y. L. Lee¹、S. Cho¹、K. M. Huang¹、Y. H. Chu¹、M. C. Wu¹ (1.National Tsing Hua Univ.)

https://doi.org/10.7567/SSDM.2009.P-9-3