[P-9-3] Metal-oxide Thin Film Transistors with Co-sputtering Novel Aluminum Zinc Oxide Yttrium Channel Layer

S. F. Chen¹, Y. L. Lee¹, S. Cho¹, K. M. Huang¹, Y. H. Chu¹, M. C. Wu¹ (1.National Tsing Hua Univ.)

https://doi.org/10.7567/SSDM.2009.P-9-3