[B-1-3] Nature of Interface Traps in Ge MIS Structures with GeO² Interfacial Layers

N. Taoka¹、W. Mizubayashi¹、Y. Morita¹、S. Migita¹、H. Ota¹、S. Takagi^1,2 (1.MIRAI-NIRC、2.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2010.B-1-3