[B-1-3] Nature of Interface Traps in Ge MIS Structures with GeO² Interfacial Layers

N. Taoka¹, W. Mizubayashi¹, Y. Morita¹, S. Migita¹, H. Ota¹, S. Takagi^1,2 (1.MIRAI-NIRC, 2.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2010.B-1-3