The Japan Society of Applied Physics

[B-4-3] Mechanism to Achieve PMOS and NMOS Band Edge Work Function using Low Temperature Tuning Process for Low Power Application

C. S. Park1, G. Bersuker1, T. Ngai1, J. Huang1, K. H. Lin2, J. Barnett1, J. Price1, K. Rader1, P. Lysaght1, B. Taylor1, P. D. Kirsch1, R. Jammy1 (1.SEMATECH , USA, 2.UMC , Taiwan)