[B-6-2] Raised S/D for Advanced Planar MOSFET devices: Challenges and Applications for the 20nm Node and Beyond

N. Loubet¹, P. Khare¹, S. Mehta², S. Ponoth², B. Haren², Q. Liu¹, K. Cheng², J. Kuss², T. Adam², B. Doris², V. Paruchuri², W. Kleemeier¹, R. Sampson¹ (1.STMicroelectronics, 2.IBM , USA)

https://doi.org/10.7567/SSDM.2010.B-6-2