[C-2-3] Experimental Investigation and Modeling for Surface Roughness Limited Mobility in Strained pMOSFETs

W. P. N. Chen¹、J. J. Y. Kuo¹、B. K. Y. Lu¹、P. Su¹ (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.C-2-3