[C-5-4] Low GIDL and Its Physical Origins in Si Nanowire Transistors

K. Zaitsu¹, M. Saitoh¹, Y. Nakabayashi¹, T. Ishihara¹, T. Numata¹ (1.Toshiba Corp. , Japan)

https://doi.org/10.7567/SSDM.2010.C-5-4