[C-6-1] Extremely-Thin SOI for Mainstream CMOS: Challenges and Opportunities

A. Khakifirooz¹、K. Cheng¹、A. Kumar¹、P. Kulkarni¹、S. Ponoth¹、B. S. Haran¹、S. Mehta¹、J. Cai¹、A. Byrant¹、J. Kuss¹、L. F. Edge¹、H. Jagannathan¹、Z. Ren¹、A. Reznicek¹、T. Adam¹、H. He¹、A. Kimball¹、S. Kanakasabapathy¹、S. Schmiz¹、S. Holmes¹、A. Majumdar¹、B. Jagannathan¹、D. Yang¹、A. Upham¹、S. C. Seo¹、J. L. Herman¹、R. Johnson¹、Y. Zhu¹、P. Jamison¹、Z. Zhu¹、L. H. Vanamurth¹、J. Faltermeier¹、S. Fan¹、D. Horak¹、T. Hook¹、V. Narayanan¹、V. Paruchuri¹、H. Bu¹、D. K. Sadana¹、P. Kozlowsk¹、B. Doris¹、D. McHerron¹、W. Haensch¹、M. Khare¹、E. Leobondung¹、J. O'Neil¹、G. Shahidi¹ (1.IBM Research , USA)

https://doi.org/10.7567/SSDM.2010.C-6-1