The Japan Society of Applied Physics

[C-6-1] Extremely-Thin SOI for Mainstream CMOS: Challenges and Opportunities

A. Khakifirooz1、K. Cheng1、A. Kumar1、P. Kulkarni1、S. Ponoth1、B. S. Haran1、S. Mehta1、J. Cai1、A. Byrant1、J. Kuss1、L. F. Edge1、H. Jagannathan1、Z. Ren1、A. Reznicek1、T. Adam1、H. He1、A. Kimball1、S. Kanakasabapathy1、S. Schmiz1、S. Holmes1、A. Majumdar1、B. Jagannathan1、D. Yang1、A. Upham1、S. C. Seo1、J. L. Herman1、R. Johnson1、Y. Zhu1、P. Jamison1、Z. Zhu1、L. H. Vanamurth1、J. Faltermeier1、S. Fan1、D. Horak1、T. Hook1、V. Narayanan1、V. Paruchuri1、H. Bu1、D. K. Sadana1、P. Kozlowsk1、B. Doris1、D. McHerron1、W. Haensch1、M. Khare1、E. Leobondung1、J. O'Neil1、G. Shahidi1 (1.IBM Research , USA)

https://doi.org/10.7567/SSDM.2010.C-6-1