The Japan Society of Applied Physics

[C-6-4] Ion-Ioff performance analysis of FDSOI MOSFETs with low processing temperature

C. Xu1, P. Batude1, C. Rauer1, C. Le Royer1, L. Hutin1, A. Pouydebasque1, C. Tabone1, B. Previtali1, O. Faynot1, M. Mouis2, V. Vinet1 (1.CEA-LETI/MINATEC, 2.IMEP , France)

https://doi.org/10.7567/SSDM.2010.C-6-4