The Japan Society of Applied Physics

[C-6-5L] Cost Efficient Novel High Performance Analog Devices Integrated with Advanced HKMG Scheme for 28nm CMOS Technology and Beyond

J. P. Han1、T. Shimizu2、L. H. Pan3、M. Voelker1、C. Bernicot4、F. Arnaud4、A. C. Mocuta3、K. Stahrenberg1、A. Azuma5、G. Yang6、M. Eller1、D. Jaeger3、H. Zhuang1、K. Miyashita5、K. Stein3、D. R. Nair3、J. H. Park7、M. Hamaguchi5、S. Kohler4、D. Chanemougame4、W. Li3、K. Kim1、N. Kim6、C. Wiedholz1、S. Miyake2、G. Tsutsui2、H. van Meer6、J. Liang1、M. Ostermayr1、J. Lian1、M. Celik4、R. Donaton3、K. Barla4、M. H. Na3、Y. Goto2、M. Sherony3、F. Johnson6、R. Wachnik3、J. Sudijono6、E. Kaste3、R. Sampson4、J.-H. Ku7、A. Steegen3、W. Neumueller1 (1.Infineon Technologise、2.Runesas、3.IBM Microelectronics、4.STMicroelectronics、5.Toshiba America、6.GLOBALFOUNDRIES、7.Samsung Electronics , USA)

https://doi.org/10.7567/SSDM.2010.C-6-5L