[C-7-4] FinFETs Junctions Optimization by Conventional Ion Implantation for (Sub-)22nm Technology Nodes Circuit Applications
A. Veloso1, A. De Keersgieter1, S. Brus1, N. Horiguchi1, P. P. Absil1, T. Hoffmann1
(1.IMEC , Belgium)
https://doi.org/10.7567/SSDM.2010.C-7-4
