POST-BREAKDOWN RECOVERABLE METAL NANOCRYSTAL-BASED AL2O3/SIO2GATE STACK FOR NON-VOLATILE MEMORY

Y. N. Chen; K. L. Pey; K. E. J. Goh; Z. Z. Lwin; P. K. Singh; S. Mahapatra; Q. X. Wang; J. Zhu

doi:https://doi.org/10.7567/SSDM.2010.E-4-3

[E-4-3] POST-BREAKDOWN RECOVERABLE METAL NANOCRYSTAL-BASED AL₂O₃/SIO₂GATE STACK FOR NON-VOLATILE MEMORY

Y. N. Chen^1,2、K. L. Pey¹、K. E. J. Goh²、Z. Z. Lwin¹、P. K. Singh³、S. Mahapatra³、Q. X. Wang⁴、J. Zhu⁴ (1.Nanyang Tech. Univ.、2.Inst. of Material Res. and Eng.,A*STAR , Singapore、3.Indian Inst. of Tech. , India、4.GlobalFoundries Singapore Pte. Ltd , Singapore)

https://doi.org/10.7567/SSDM.2010.E-4-3

2010 International Conference on Solid State Devices and Materials

[E-4-3] POST-BREAKDOWN RECOVERABLE METAL NANOCRYSTAL-BASED AL2O3/SIO2GATE STACK FOR NON-VOLATILE MEMORY

[E-4-3] POST-BREAKDOWN RECOVERABLE METAL NANOCRYSTAL-BASED AL₂O₃/SIO₂GATE STACK FOR NON-VOLATILE MEMORY