[E-6-2] Current Development Status and Future Challenges of FeRAM

Y. Fujimori¹、H. Kimura¹、Y. Ichida¹、J. Iida¹、K. Ashikaga¹、H. Ito¹、T. Ozawa¹、T. Kanaya¹、N. Kinouchi¹、T. Suzuki¹、T. Date¹、D. Notsu¹、T. Fuchikami¹、Z. Zhiyong¹、M. Kojima¹、M. Moriwake¹、H. Takasu¹ (1.ROHM Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2010.E-6-2