[F-5-1] Three Dimensional Floating Gate Memory with Multi-layered Nanodot Array Formed by Bio-LBL

K. Ohara¹, B. Zheng^1,2, M. Uenuma^1,2, I. Yamashita^1,2, Y. Uraoka^1,2 (1.NAIST, 2.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2010.F-5-1