[F-5-1] Three Dimensional Floating Gate Memory with Multi-layered Nanodot Array Formed by Bio-LBL

K. Ohara¹、B. Zheng^1,2、M. Uenuma^1,2、I. Yamashita^1,2、Y. Uraoka^1,2 (1.NAIST、2.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2010.F-5-1