[G-9-2] Fabrication of CMOS-compatible Poly-Si Nanowire FET Sensor

H. Y. Chen^1,2、C. Y. Lin²、M. C. Chen²、H. C. Chen²、C. C. Huang²、C. H. Chien^1,2 (1.National Chiao Tung Univ.、2.National Nano Device Labs. , Taiwan)

https://doi.org/10.7567/SSDM.2010.G-9-2