[I-8-3] Microstructures of polycrystalline silicon films formed through explosive crystallization induced by flash lamp annealing

K. Ohdaira^1,2、S. Ishii¹、N. Tomura¹、H. Matsumura¹ (1.JAIST、2.JST , Japan)

https://doi.org/10.7567/SSDM.2010.I-8-3