[I-8-3] Microstructures of polycrystalline silicon films formed through explosive crystallization induced by flash lamp annealing

K. Ohdaira^1,2, S. Ishii¹, N. Tomura¹, H. Matsumura¹ (1.JAIST, 2.JST , Japan)

https://doi.org/10.7567/SSDM.2010.I-8-3