[K-8-5] Strain-Induced Back Channel Electron Mobility Enhancement in Poly-Si TFTs Formed by Continuous-Wave Laser Lateral Crystallization

S. Fujii¹, S. I. Kuroki¹, K. Kotani¹, T. Ito¹ (1.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.K-8-5