[P-1-15] Electrical characterization of wafer-bonded germanium-on-insulator substrates using a four-point-probe pseudo-MOSFET

Y. Iwasaki¹、Y. Nakamura¹、J. Kikkawa¹、A. Sakai¹、M. Sato²、E. Toyoda²、H. Isogai²、K. Izunome² (1.Osaka Univ.、2.Covalent Silicon Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2010.P-1-15