The Japan Society of Applied Physics

[P-3-13] Investigation of Low-Cost Stress Memorization Process on Layout and Low-Frequency Noise Performance for Strained-Si nMOSFETs

C. W. Kuo1, S. L. Wu2, H. Y. Lin1, Y. T. Huang1, S. J. Chang1, D. G. Hong2, C. Y. Wu2, Y. C. Cheng3, O. Cheng3 (1.National Cheng Kung Univ., 2.Cheng Shiu Univ., 3.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-3-13