[P-3-13] Investigation of Low-Cost Stress Memorization Process on Layout and Low-Frequency Noise Performance for Strained-Si nMOSFETs

C. W. Kuo¹, S. L. Wu², H. Y. Lin¹, Y. T. Huang¹, S. J. Chang¹, D. G. Hong², C. Y. Wu², Y. C. Cheng³, O. Cheng³ (1.National Cheng Kung Univ., 2.Cheng Shiu Univ., 3.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-3-13