Calibration of Linear Piezo Resistance Coefficients using 3-Dimensional Stress Simulation of Si-MOSFETs Structures

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

A. Satoh¹, T. Tada¹, V. Poborchii¹, T. Kanayama¹, S. Satoh², H. Arimoto¹ (1.AIST, 2.Fujitsu Semiconductor Ltd. , Japan)