[P-3-22] Calibration of Linear Piezo Resistance Coefficients using 3-Dimensional Stress Simulation of Si-MOSFETs Structures

A. Satoh¹、T. Tada¹、V. Poborchii¹、T. Kanayama¹、S. Satoh²、H. Arimoto¹ (1.AIST、2.Fujitsu Semiconductor Ltd. , Japan)

https://doi.org/10.7567/SSDM.2010.P-3-22