[P-3-25] High-Performance (S. S.<100 mV/dec) Poly-Si TFTs with Laser Annealed Channel and High-κ Metal-Gate on Glass Substrate

Y. H. Lue¹、C. H. Chien¹、P. Y. Kuo¹、M. J. Yang¹、H. Y. Lin²、T. S. Chao¹ (1.National Chiao Tung Univ.、2.Toppoly Optoelectronics Corp. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-3-25