[P-3-25] High-Performance (S. S.<100 mV/dec) Poly-Si TFTs with Laser Annealed Channel and High-κ Metal-Gate on Glass Substrate

Y. H. Lue¹, C. H. Chien¹, P. Y. Kuo¹, M. J. Yang¹, H. Y. Lin², T. S. Chao¹ (1.National Chiao Tung Univ., 2.Toppoly Optoelectronics Corp. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-3-25