[P-3-5] The Observation of the Random Dopant Fluctuation in Strained-SOI Devices

C. Y. Cheng¹、E. R. Hsieh¹、S. S. Chung¹、R. M. Huang²、Y. H. Lin²、C. T. Tsai²、G. H. Ma²、C. W. Liang² (1.National Chiao Tung Univ.、2.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-3-5