[P-6-9] Enhanced Device Performance of AlGaN/GaN MOSHEMT with Thermal Oxidation

S. Liu¹、J. Wang¹、R. Gong¹、Z. Dong¹、M. Yu¹、C. P. Wen¹、C. Zeng²、Y. Cai²、B. Zhang² (1.Peking Univ.、2.Suzhou Inst. of Nano-tech and Nano-bionics , China)

https://doi.org/10.7567/SSDM.2010.P-6-9