Electric properties of SONOS memories with embedded silicon nanocrystals in nitride

M. C. Hsieh; T. Y. Chiang; H. A. Dai; C. C. Chen; C. H. Chiang; J. F. Wang; Y. J. Lin; J. Y. He; Y. N. Chen; T. S. Chao; J. F. Chen

doi:https://doi.org/10.7567/SSDM.2010.P-9-12

[P-9-12] Electric properties of SONOS memories with embedded silicon nanocrystals in nitride

M. C. Hsieh¹, T. Y. Chiang¹, H. A. Dai¹, C. C. Chen¹, C. H. Chiang¹, J. F. Wang¹, Y. J. Lin¹, J. Y. He¹, Y. N. Chen¹, T. S. Chao¹, J. F. Chen¹ (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-9-12

2010 International Conference on Solid State Devices and Materials

[P-9-12] Electric properties of SONOS memories with embedded silicon nanocrystals in nitride