The Japan Society of Applied Physics

[P-9-12] Electric properties of SONOS memories with embedded silicon nanocrystals in nitride

M. C. Hsieh1、T. Y. Chiang1、H. A. Dai1、C. C. Chen1、C. H. Chiang1、J. F. Wang1、Y. J. Lin1、J. Y. He1、Y. N. Chen1、T. S. Chao1、J. F. Chen1 (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-9-12