[P-9-7] High-Performance Polycrystalline Silicon Thin-Film Transistor with Nickel-Titanium Oxide by Sol-Gel Spin-Coating and Fluorine Implantation

S. C. Wu¹, T. H. Hou¹, S. H. Chuang², H. C. Chou², P. Y. Kuo¹, T. S. Chao¹, T. F. Lei¹ (1.National Chiao Tung Univ., 2.National Univ. of Kaohsiung , Taiwan)

https://doi.org/10.7567/SSDM.2010.P-9-7