Effects of Plasma-PH3 passivation on Mobility Degradation Mechanisms and Current Conduction Mechanisms of In0.53Ga0.47As N-MOSFET

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

A. B. S. Sumarlina^1,2、H. J. Oh¹、A. Du²、S. J. Lee¹ (1.National Univ. of Singapore、2.GLOBALFOUNDRIES Singapore Pte.Ltd. , Singapore)