[C-3-3] Performance Evaluation of a Logic-IP Compatible (LIC) Embedded DRAM with Cylinder Capacitors in Low-k/Cu BEOL Layers

I. Kume¹, N. Inoue¹, K. Hijioka¹, J. Kawahara¹, K. Takeda¹, N. Furutake¹, H. Shirai¹, K. Kazama¹, S. Kuwabara¹, M. Watarai¹, T. Sakoh¹, T. Takahashi¹, T. Ogura¹, T. Taiji¹, Y. Kasama¹, M. Sakamoto¹, M. Hane¹, Y. Hayashi¹ (1.Renesas Electronics Corp. , Japan)

https://doi.org/10.7567/SSDM.2011.C-3-3