[C-3-3] Performance Evaluation of a Logic-IP Compatible (LIC) Embedded DRAM with Cylinder Capacitors in Low-k/Cu BEOL Layers

I. Kume¹、N. Inoue¹、K. Hijioka¹、J. Kawahara¹、K. Takeda¹、N. Furutake¹、H. Shirai¹、K. Kazama¹、S. Kuwabara¹、M. Watarai¹、T. Sakoh¹、T. Takahashi¹、T. Ogura¹、T. Taiji¹、Y. Kasama¹、M. Sakamoto¹、M. Hane¹、Y. Hayashi¹ (1.Renesas Electronics Corp. , Japan)

https://doi.org/10.7567/SSDM.2011.C-3-3