[C-9-4] Effects of Cu Film Texture and Barrier Structure on Cu Grain Growth

K. Kohama¹, T. Matsumoto¹, K. Ito¹, Y. Shirai¹, M. Murakami² (1.Kyoto Univ., 2.The Ritsumeikan Trust , Japan)

https://doi.org/10.7567/SSDM.2011.C-9-4