[C-9-4] Effects of Cu Film Texture and Barrier Structure on Cu Grain Growth

K. Kohama¹、T. Matsumoto¹、K. Ito¹、Y. Shirai¹、M. Murakami² (1.Kyoto Univ.、2.The Ritsumeikan Trust , Japan)

https://doi.org/10.7567/SSDM.2011.C-9-4