[CI-6-3] Si Waveguide-Integrated MSM Ge Photodiode J. Fujikata1,2, M. Noguchi1,2, M. Miura1,2, D. Okamoto1,2, T. Horikawa1,3, Y. Arakawa1,4 (1.PECST, 2.PETRA, 3.AIST, 4.Univ. of Tokyo , Japan) https://doi.org/10.7567/SSDM.2011.CI-6-3