The Japan Society of Applied Physics

[D-7-3] Advantages of Silicon Nanowire MOSFETs over Planar Ones Investigated from the Viewpoints of Static and Noise Properties

W. Feng1,2、R. Hettiarachchi1,2、S. Sato3、K. Kakushima3、M. Niwa1,2、H. Iwai3、K. Yamada1,2、K. Ohmori1,2 (1.Univ. of Tsukuba、2.CREST-JST、3.Tokyo Tech , Japan)

https://doi.org/10.7567/SSDM.2011.D-7-3