Enabling epitaxy on ultrathin implanted SOI

L. Grenouillet; N. Possémé; S. Ponoth; N. Loubet; V. Destefanis; Y. Le Tiec; S. Mehta; A. Kumar; Q. Liu; B. Haran; K. Cheng; N. Berliner; J. Fullam; J. Kuss; G. Shahidi; O. Faynot; B. Doris; M. Vinet

doi:https://doi.org/10.7567/SSDM.2011.E-9-2

[E-9-2] Enabling epitaxy on ultrathin implanted SOI

L. Grenouillet¹, N. Possémé¹, S. Ponoth², N. Loubet³, V. Destefanis¹, Y. Le Tiec¹, S. Mehta², A. Kumar², Q. Liu³, B. Haran², K. Cheng², N. Berliner², J. Fullam², J. Kuss², G. Shahidi², O. Faynot¹, B. Doris², M. Vinet¹ (1.CEA-LETI , FRANCE, 2.IBM, 3.STMicroelectronics , USA)

https://doi.org/10.7567/SSDM.2011.E-9-2

2011 International Conference on Solid State Devices and Materials

[E-9-2] Enabling epitaxy on ultrathin implanted SOI