Enabling epitaxy on ultrathin implanted SOI

L. Grenouillet; N. Possémé; S. Ponoth; N. Loubet; V. Destefanis; Y. Le Tiec; S. Mehta; A. Kumar; Q. Liu; B. Haran; K. Cheng; N. Berliner; J. Fullam; J. Kuss; G. Shahidi; O. Faynot; B. Doris; M. Vinet

doi:https://doi.org/10.7567/SSDM.2011.E-9-2

[E-9-2] Enabling epitaxy on ultrathin implanted SOI

L. Grenouillet¹、N. Possémé¹、S. Ponoth²、N. Loubet³、V. Destefanis¹、Y. Le Tiec¹、S. Mehta²、A. Kumar²、Q. Liu³、B. Haran²、K. Cheng²、N. Berliner²、J. Fullam²、J. Kuss²、G. Shahidi²、O. Faynot¹、B. Doris²、M. Vinet¹ (1.CEA-LETI , FRANCE、2.IBM、3.STMicroelectronics , USA)

https://doi.org/10.7567/SSDM.2011.E-9-2

2011 International Conference on Solid State Devices and Materials

[E-9-2] Enabling epitaxy on ultrathin implanted SOI