Fabrication of a micro-lens array for Reflective Electron Beam Lithography

B. Vereecke; L. Haspeslagh; F. Lazzarino; R. A. Miller; K. Kellens; H. Dekkers; R. Freed; L. Grella

doi:https://doi.org/10.7567/SSDM.2011.H-7-2

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[H-7-2] Fabrication of a micro-lens array for Reflective Electron Beam Lithography

B. Vereecke¹, L. Haspeslagh¹, F. Lazzarino¹, R. A. Miller¹, K. Kellens¹, H. Dekkers¹, R. Freed², L. Grella² (1.Imec , Belgium, 2.KLA-Tencor Corp. , USA)

https://doi.org/10.7567/SSDM.2011.H-7-2

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