[H-7-2] Fabrication of a micro-lens array for Reflective Electron Beam Lithography

B. Vereecke¹、L. Haspeslagh¹、F. Lazzarino¹、R. A. Miller¹、K. Kellens¹、H. Dekkers¹、R. Freed²、L. Grella² (1.Imec , Belgium、2.KLA-Tencor Corp. , USA)

https://doi.org/10.7567/SSDM.2011.H-7-2